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slideserve.com
Metallization - SlideServe
Metallization. ECE/ChE 4752: Microelectronics Processing Laboratory. Gary S. May February 26, 2004. Outline. Introduction Physical Vapor Deposition Chemical Vapor Deposition Aluminum Metallization Copper Metallization. Basics. Goal : form low-resistance interconnections Types :
Mar 23, 2012
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