Hospital stays can be long and arduous; they can also cause serious complications. When a person lies in one position too ...
Abstract: This report presents a novel silicon resonant pressure sensor designed for high-pressure environments such as deep-sea and petroleum applications. The pressure sensor detects pressure based ...
Abstract: This letter presents the design methodology and heterogeneous fabrication process of a novel dual-mode microelectromechanical systems gas pressure sensor that vertically integrates ...
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