Fractilia, the industry leader in high-accuracy stochastics metrology and control, today announced that its FAME 300(TM) system has been adopted for production use by a top-five semiconductor device ...
Following its acquisition of Candela Instruments, KLA-Tencor (www.kla-tencor.com) has introduced the Candela CS20, an automated wafer inspection system designed to address the defect management ...
Metrology giant KLA-Tencor says that electron beam inspection is ready for volume production line monitoring, not just development and ramp. Shrinking features and higher aspect ratios coupled with ...
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