When is a line not a line? When it’s a series of tiny dots, of course! The line is actually tiny, laser-etched craters, 0.25 mm center-to-center. That’s the technique [Ed Nisley] used to create a ...
Extreme ultraviolet (EUV) lithography exposed resist patterns can exhibit excessive line edge roughness (LER) and line width roughness (LWR) due to random or shot noise. Increasing the EUV exposure ...
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